Oscillation-Speed-Control-Type Polishing with a Small Tool. 2nd Report. Wafer Profiles Polished at High Revolution Speed and with Tool Overhang.

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ژورنال

عنوان ژورنال: Journal of the Japan Society for Precision Engineering

سال: 2002

ISSN: 1882-675X,0912-0289

DOI: 10.2493/jjspe.68.1342